| 摘要 |
PURPOSE:To make it possible to shorten a positioning time and move a stage large amount by so constituting it as to move in a plane by utilizing motor rotation by guides freely supporting elastic hinges fixed to it in longitudinal direction. CONSTITUTION:In order to move a stage DELTAx in X axis direction, when a guide 7A is rotated anticlockwise and a guide 7B clockwise DELTAtheta respectively, DELTAtheta is determined by the speed reduction ratio of a motor to the guides and motor rotation angles. That is, when the length of elastic hinge 6 is l, DELTAx can be considered to be nearly equal to l.DELTAtheta, and if l=10mm, alpha=1/10 in using of a stepping motor of a resolving power of 0.36 deg./ pulse, because DELTAx is a minute among amount of 6.3mum/pulse, one revolution of the motor enables the stage to move 6.3mm. And in the same way, Y and X axes can be controlled by conbining guides 7A thru 7D. Thus, compensation calculation becomes unnecessary resulting in shortening the positioning time. And the use of motors bring about a large moving amount. |
