| 摘要 |
PURPOSE:To obtain ultrafine alloy (composite compd.) particles having a desired compsn. by heating plural evaporating materials at the controlled temp., mixing the evaporating materials in a high-temp. atmosphere then ejecting the mixture into a low-pressure gas. CONSTITUTION:The outputs of a high-frequency induction heating power source 4 and a DC power source 5 are adjusted to heat a carbon crucible 8 and alumina tube 9 in an evaporation section B to a prescribed temp. Eddy currents are induced in the crucible 8 by the high-frequency induction and Sn metal 12A, etc. placed in a heating section 80 are evaporated. Zn metal 12B in the tube 9 is also heated to evaporate by a heater 11. Both metallic vapors are mixed in the vapor mixing section in the high-temp. atmosphere and the mixture is ejected from a vapor ejection port 83 into the low-temp. atmosphere in a vacuum vessel A. The ejected vapor mixture composed of Sn-Zn, etc. collides against the Ar particles in the vessel A and the ultrafine alloy (composite compd.) particles are formed. The particles stick to a substrate 22. The compsn. of the ultrafine particles is adjusted by changing the outputs of the respective power sources and controlling the temp.
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