PRODUCTION OF VERTICAL MAGNETIC RECORDING MEDIUM

摘要

PURPOSE:To make possible the production of a vertical magnetic recording medium at a high speed by forming a thin film consisting of Ti, Si and Ge by using a sputtering method and forming a vertical magnetized film consisting essentially of Co and Cr and having vertical magnetic anisotropy by using a vacuum deposition method in the stage of providing the vertical magnetized film on a thin film. CONSTITUTION:The deposition speed of the thin film consisting of the compsn. composed of >=1 kinds among Ti, Si and Ge may be lower by about one digit than the deposition speed of the thin Co-Cr film in the case of sticking continuously the former and latter films. The deposition speed of the thin film by the sputtering method is generally lower by about one digit than the deposition speed of the thin film by the vacuum deposition method. The coercive force of the Co-Cr film when the thin film consisting of the compsn. composed of >=1 kinds among Ti, Si and Ge is stuck onto a polyethylene terephthalate film by the sputtering method and further the thin Co-Cr film is stuck on the thin film by the vacuum deposition method compares favorably with the value when the latter film is stuck by the sputtering method and there is not much difference in the recording density characteristic between both films.