| 摘要 |
PURPOSE:To effectively perform wiring operation by a method wherein a blower mechanism is provided on a voice coil-type linear motor so as to blow a driving section of the motor and to prevent foreign material from adhering, with the response of the motor being maintained. CONSTITUTION:A gas inlet 16 to which a gas supply pipe 15 is to be connected is provided on one side of a cover 13 which covers the driving mechanism of a voice coil-type linear motor 7, and a gas outlet 18 to which a discharge pipe 17 is to be connected is provided on the other side. During the bonding, clean air 19 flows through the gap between a driving coil section 8 and a yoke 12, thereby preventing foreign material such as iron powder, dust, etc. from adhering on the motor. |
