发明名称 INSPECTING WORK ADVANCE MANAGING DEVICE OF MEMORY ELEMENT
摘要 PURPOSE:To realize labor saving and the automation of an inspecting work advance management by recording a method of an inspection before that time and its result, as a history in a storage element itself. CONSTITUTION:A storage element E being an object to be inspected is inspected by a work process A1, etc. of an inspection line A, and a method and a result of its inspection are binary-coded and written as a history in the element E. From the element, the progress to be inspected, before that time is read by a data input/output processor B. Also, an inspecting condition of the next process is determined, and in accordance with necessity, the element E is carried to a selected inspecting work process A2, etc., and stored in a storage place C2, etc. Quantity of the stored element E is measured by a photosensor, etc., and displayed on a display device Di.
申请公布号 JPS61267999(A) 申请公布日期 1986.11.27
申请号 JP19850108167 申请日期 1985.05.22
申请人 HITACHI LTD 发明人 TSUYAMA TSUTOMU;HARADA MASAHIDE;TAKAHASHI TSUTOMU
分类号 H01L21/02;G11C29/00;G11C29/44;H01L21/66 主分类号 H01L21/02
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