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发明名称
THIN FILM SPUTTERING
摘要
申请公布号
GB8625191(D0)
申请公布日期
1986.11.26
申请号
GB19860025191
申请日期
1986.10.21
申请人
UNITED KINGDOM ATOMIC ENERGY AUTHORITY
发明人
分类号
主分类号
代理机构
代理人
主权项
地址
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