| 摘要 |
<p>A precision device comprising a holding means (86) for holding an object and a supporting means (4, 6, 8, 10) for supporting an operating element (48), one of which is movable in a predetermined direction. The precision device includes a detecting means (52, 54) for detecting the amount of movement of one of the holding member (86) and the supporting member (10) in said predetermined direction, and the detecting means (52, 54) includes a scale (58, 68) formed of a material having a coefficient of linear expansion, in a temperature range of -20 to 100°C, of not more than 10 x 10 7/1Cas an absolute value. The precision device further comprises a detecting means (76, 80, 84) for detecting the amount of thermal expansion of at least a part (10) of the supporting means in said predetermined direction.</p> |
