| 摘要 |
PURPOSE:To reduce a size and improve responsiveness at the time of ON-OFF control by employing a three-layer composition consisting of a substrate, serving as a resistance heater as well, an insulation layer and a superconducting layer. CONSTITUTION:A three-layer composition consisting of a substrate 11 of a thin stainless steel plate, a metal oxide insulation layer 12 and a meandering superconducting layer 13 is provided. The metal oxide insulation layer 12 is formed by, for instance, sputtering in a mixture gas of O2 and Ar with Nb as a target. The superconducting layer 13 is made of B1 type compound superconductor and formed, for instance, in such a manner that Nb is employed as a target and a mask with a meandering slit is provided on the metal oxide insulation layer 12 and a matrix layer from which a superconducting layer can be produced is formed and subjected to heat treatment. Lead wires 14a and 14b for current supply are connected to the substrate 11 and wire ends 15a and 15b of a superconducting coil are connected to the superconducting layer 13. |
