| 摘要 |
PURPOSE:To make it possible to automatically inspect not only the continuity, breakage, approach, contact and contact inferiority of linear matter but also the shape thereof, by storing the normal image signal corresponding to the gathering of a plurality of illumination lights having different irradiation angles to use the same as reference. CONSTITUTION:Each beam projecting source of a laser beam irradiation means 7 irradiates a semiconductor apparatus chip 1 from all directions. Next, the output signal picked up by an image pick-up means 8 is converted to a digital signal by an A/D converter 9. Subsequently, an image memory change-over means 10 allows the respective corresponding parts a, b... of an image memory means 11 to store image signals corresponding to respective irradiation angles under the control of a control apparatus 17. An inspection area reading apparatus 12 reads the image signal corresponding to the inspection area indicated by an inspection area indication means 15 from each of the parts a, b... of the means 11 under the control of the control apparatus 17. Next, the shape inspection means 13 of an inspection means 16 judges, for example, whether the shape of a bonding wire is normal and, if there is a flaw, said flaw is displayed on a flaw display means 14. |
