| 摘要 |
PURPOSE:To form an alloy target which is large in size and provides high productivity by consisting said target of an alloy contg. a transition metal and specific rare earth metal, consisting of the uniform compsn. and having the density approximately equal to the theoretical density. CONSTITUTION:This target consists of the alloy contg. one kind of the transition metal and the rare earth metal selected from the group consisting of Tb, Gd, Dy, Eu, Ho, Er, Tm, Yb and Lu, consisting of substantially uniform compsn. and having the density approximately equal to the theoretical density. The transition metal includes iron, cobalt, nickel, etc. and >=2 kinds of these metals may be simultaneously incorporated into the alloy. The mixing ratio of the transition metal and rare earth metal is generally 85-60at%-15-40at% the latter with respect to the former. Oxygen staining is hardly admitted with the target obtd. in the above-mentioned manner.
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