| 摘要 |
PURPOSE:To facilitate cleaning of a rack device, which is to store semi- conductive wafer in clean condition, by installing racks at the wall surface of a cylindrical pillar from which the cleaning air jets out, and by arranging them within an exterior construction. CONSTITUTION:When a fan 40 sends air to a discharge pipe 16, the air passes inside a pillar 8, wherein the air is cleaned, and is discharged out of a discharge part 12. The air flows in the spaces between the racks 10, and passes through cassettes 9 accommodating semi-conductive wafers to reach air suction parts 18, 20. This can prevent attachment of dust and dirt to the cassettes 9 and wafers therein. Thus cleaning is facilitated.
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