发明名称 |
Electron beam substrate height sensor. |
摘要 |
<p>Disclosed is a method utilizable in a focused deflected particle beam system for trigonometrically determining workpiece surface height displacement from a previously determined calibration plane by using fiducial marks on the workpiece surface, movement of the mechanical stage holding the workpiece, calibrated electronic drive for beam deflection and beam landing angle information.</p> |
申请公布号 |
EP0201858(A2) |
申请公布日期 |
1986.11.20 |
申请号 |
EP19860106224 |
申请日期 |
1986.05.06 |
申请人 |
THE PERKIN-ELMER CORPORATION |
发明人 |
WIESNER, JOHN C.;CAVAN, DANIEL L. |
分类号 |
H01J37/304;H01J37/305;G01B15/00;H01J37/147;H01L21/027;(IPC1-7):H01J37/304;H01J37/20;H01J37/317 |
主分类号 |
H01J37/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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