| 摘要 |
PURPOSE:To provide a laser beam machine which can maintain the mirror and lens face in a beam chamber in a clean state enclosing an optical path for a laser bean from a laser oscillator to a condenser lens of a processing head by connecting a vacuum pump to said beam chamber and maintaining the inside of said chamber under a negative pressure. CONSTITUTION:The laser beam oscillated from a laser oscillating chamber 1 is irradiated through the condenser lens 3 on a work through the beam chamber 5 in which the negative pressure is maintained by the vacuum pump 6. The work is thereby processed. The dust, etc. present in the chamber 5 are thus decreased by the low pressure in the chamber 5 and the mirror and lens face of the chamber 5 can be maintained in the clean state. The thermal expansion in the narrow space of the chamber 5 is suppressed and further the distortion of the transverse mode of the laser beam is suppressed. The dew point temp. in the chamber 5 is shifted to a low temp. side and the deterioration of the mirror, etc. by dew condensation is prevented. |
