| 摘要 |
<p>A vibratory specimen stage for a scanning microscope, said stage (7) being mounted within a support frame (8) in such a way as to enable scanning movement to be effected in the plane of the drawing (the X-Y plane). The stage is attached to the frame by means of four leaf springs (9, 10, 11, 12) made of sheet material and scanning movement is effected in the X-direction by a pair of linear motors (15, 16) and in the Y-direction by a further pair of linear motors (17, 18).</p> |
