Phospho-boro-silanol interlayer dielectric films and preparations.

摘要

There are disclosed certain categories of novel spin-coating compositions comprising phosphorus-doped and/or boron-doped silsesquioxane oligomers. Cured interlayer dielectric films prepared therefrom have a superior combination of defined properties, particularly including adhesion (of single-coat and multiple coats) and/or resistance against degradation at temperatures above 500°C. The spin-coating compositions are prepared in a critical manner from critical raw materials.