| 摘要 |
PURPOSE:The titled board capable of pulling clearly melt for growth and of raising reproducibility of a vapor-pressure controlling atmosphere, being provided with a movable piece and a close type cover. CONSTITUTION:The slider 4 is slid from the right side in the arrow direction, the substrate crystal 2 is brought into contact with the melt 5 for washing, the surface of the substrate crystal 2 is washed, the slider 4 is further moved in the arrow direction, the substrate crystal 2 is brought into contact with the melt 7 for growing and subjected to epitaxial growth. When the slider 4 is transferred in the left direction, the melt 7 for growing is pulled by the movable piece 13, the substrate crystal 2 is put in the empty chamber 11 and cooled. Since the empty chamber 11 is connected to the vapor-pressure control material chamber 10, it is kept in a vapor-pressure controlling atmosphere during cooling. Since the cover 14 is fixed to the slider 4 and a closed structure is formed, this process has improved reproducibility of the vapor-pressure control atmosphere. A higher-quality epitaxial layer is obtained since a melt composition during growth is kept in higher stability than a case where the cover 14 is not set.
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