| 摘要 |
PURPOSE:To obtain the titled lens readily, by forming a metallic film for preventing ion diffusion and protective film one after another on a transparent glass substrate, providing an opening to diffuse ions and form a lens part and leaving the metallic film and protective film as a light shielding film. CONSTITUTION:A metallic film 12, e.g. titanium film, for preventing ion diffusion is formed on one side of a transparent glass substrate 11, and a protective film 16, e.g. SiO2 film, is then formed thereon. An opening 13 for ion diffusion is further formed in the protective film 16 and metallic film 12 by the technique of photolithography. The resultant opening 13 is then brought into contact with a high-temperature molten salt containing ions greatly contributing to the refractive index to diffuse the ions through the opening 13 into the transparent glass substrate 11 and form a lens part 14. The protective film 16 and metallic film 12 near the opening 13 are removed by etching to from an opening 20 of size corresponding to the lens part 14 and leave the protective film 16 and metallic film 12 which are not removed by etching as a light shielding layer.
|
