| 摘要 |
PURPOSE:To make it possible to manufacture pallets which have less noise, vibration and dust generation, by incorporating replaceable bombs in a pallet which is therefore floated up by jetted compressed air stored in the bomb, and by providing a filter between a gas pressure source and a blow-out port pad. CONSTITUTION:When a shut-off switch 27 is closed, solenoid valves in gas extracting tools 23, 24 are opened so that compressed air is discharged from bombs 21, 33, the pressure of the compressed air being suitably reduced by means of pressure reducing valves 29, 30, and flows into main pipe 31, passing through branch pipes 32, 33 and being discharged from bearing pads 35. Thereby, a transfer pallet entirely floats up with a slight gap from a road surface member 56, and even if a wafer, etc. to be transferred is set thereon, since no substantial running friction is effected, the pallet may be moved at a high speed by a long distance when it is pushed by a slight force. Further, the thus pushed pallet 11 is led by a guide wall 57 through the intermediary of guide roller members 52 straight forward, and is then stopped by a stopper 66 which is extended and retracted by an air cylinder device 65 at the branching point. Therefore, it may be pushed in the branching direction indicated by the arrow 67 by means of a push-out mechanism 66.
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