| 摘要 |
PURPOSE:To perform positioning operation while suppressing vibration at any time by inputting the output of a positioning circuit to a limiter so that a value close to the drive input limit value of a motor is a limit value and determining an input to be supplied to the motor by using the output of the limiter and the output of a speed vibration suppressing circuit. CONSTITUTION:A driving shaft 2 is rotated by driving the motor 1 to position an XY stage 3, whose position thetaS and speed omegaS are detected by a stage detector 4. Further, the position thetaM and speed omegaM of the motor are detected by a motor detector 5 and those values thetaS and omegaS, and thetaM and omegaM detected by those detectors 4 and 5 are fed back to a positioning control circuit 6. The positioning control circuit 6 uses the position command thetaS supplied from a position command circuit 7 and the detected values thetaS and omegaS, and thetaM and omegaM which are fed back to perform positioning control arithmetic, thereby determining electric power ia to be inputted to the motor 1. Namely, the motor current ia is regarded as a manipulated variable. |
