| 发明名称 |
Indexing of laser beam for programming VLSI devices |
| 摘要 |
A target for a laser beam consists of a plurality of closely spaced lines that causes the generation of an readily-identifiable read-out so that the laser beam can be indexed when performing laser scribing for redundant memory devices or the like.
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| 申请公布号 |
US4623403(A) |
申请公布日期 |
1986.11.18 |
| 申请号 |
US19840621280 |
申请日期 |
1984.06.15 |
| 申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
WILLS, KENDALL S.;RODRIGUEZ, PAUL A. |
| 分类号 |
G06F11/20;G11C5/00;H01L23/525;H01L23/544;(IPC1-7):G01B9/02;G01B11/02 |
主分类号 |
G06F11/20 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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