| 摘要 |
PURPOSE:To enable the automation of the processing with types of material and with types of working and the collection of the records of works by a method wherein a processor having an indication element is provided in the main body of a wafer carrier jig. CONSTITUTION:All types of wafers, the information of wafer identification, the names of processing and the conditions of working with types of process are registered in the computer having CRT which can communicate with an information input-output terminal 5. Then, the partinent information is selected from said informations, and after the information input-output terminal 5 of a wafer carrier jig main body 1 is connected to the computer, the selected information is transmitted to the recording part of a processor 3. The wafer is inserted into the jig main body 1 from the wafer taking-in and taking-out hole 1a, and the preparation is completed. When a measure for generation of defective product is necessary, the data of works performed is transferred from the processor to the computer, and it is properly controlled there. Using the program for analysis and the like, evaluation for the rate of yield is performed, and a counter measure is examined. As a result, the control of wafers can be automated. |
