| 摘要 |
PURPOSE:To improve the wear resistance of a sliding surface with a magnetic tape, etc. without deteriorating the magnetic characteristics of a magnetic alloy by implanting ions to the surface in contact with the gap of a magnetic core consisting of the magnetic alloy or subjecting said surface to a diffusion treatment of atoms. CONSTITUTION:The 1st magnetic ally film 1-1 is formed on a substrate 4 and the right part of the 1st magnetic alloy film 1-1 is removed to form a slope 6 which is a magnetic gap part. The ions of Cr, etc. are implanted 3 to slope 6 and the film 1-1 by using a high-frequency type or duoplasma type ion source. Silicon dioxide is further sputtered over the entire top surface to form a blank material to be used subsequently as the gap 2 and in succession the 2nd mag netic alloy film 1-2 is formed by sputtering. The 2nd magnetic alloy film 1-2 on the film 1-1 is removed and finally the core is subjected to working of a coil hole, etc. and is made into the magnetic head. The hard ion implanted layer 3 is thus formed along the slope 6, i.e., in contact with the gap 2 perpendic ular approximately to the surface of the magnetic core 1 to slide with the magnetic tape, etc. |
