| 摘要 |
PURPOSE:To facilitate the repairing of a vapor deposition film at the time of the damage or detachment of said film, by forming a vapor deposition layer containing a metal and nitrogen or metal nitride to the surface of the member for vacuum machinery before applying heat treatment thereto. CONSTITUTION:The vacuum degree in the vacuum container of a sputtering apparatus is set to about 10<-6>torr and molybdenum and boron nitride are simultaneously subjected to sputtering. As a result, a vapor deposition layer 5 of molybdenum containing boron and nitrogen is formed to the surface of a susceptor 2 made of molybdenum. Subsequently, the treated susceptor 2 is transferred to the other vacuum container to receive post-treatment and heated at 400 deg.C or more for 1-2hr to diffuse boron and nitrogen throughout the vapor deposition layer 5 of molybdenum containing boron and nitrogen and boron nitride is precipitated to the uppermost surface layer to form a boron nitride film 6. |
