| 摘要 |
PURPOSE:To simply measure the speed of a surface wave with respect to the desired position of a specimen, by detecting the position and moving amount of the specimen stage opposed to an acoustic lens. CONSTITUTION:A state 7 is moved by predetermined quantity by X-axis, Y-axis and Z-axis drive apparatuses 13-15 and the outputs of the X-, Y-, and Z-position detection apparatuses 16-18 provided to the drive apparatuses 13-15 are inputted to a computer 2 through an interface 3 to determine the positions X, Y, Z. The ultrasonic reflection signal taken in through an acoustical lens 6 is subjected to A/D conversion by an A/D converter 9 and inputted to the computer 2 to be stored to receive operational processing. The acoustic lens 6 is set to the arbitrary position of a specimen to change the distance of the state in the Z-direction vertical to the X-Y-plane of said stage with respect to the acoustic lens and the change quantity thereof is detected while the digital signal at each distance position is operated to calculate surface wave speed distribution or a V(z) curve.
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