| 摘要 |
<p>PURPOSE:To stabilize the moisture-sensitive characteristic of the titled material for a long period of time by using the residue product obtd. after calcination of the compsn. contg. at least one kind among the oxide, composite oxide, hydroxide, and oxysalt of an alkali metal, a polymer of org. silicon compd. and zeolite. CONSTITUTION:A moisture-sensitive film 3 consisting of the residue product obtd. after calcination of the compsn. contg. one kind among the oxide, composite oxide, hydroxide and oxysalt of an alkali metal, a polymer of org. silicon compd. and zeolite is formed on an Al2O3 insulating substrate 1 on which comb-shaped electrodes 2 of Pt-Pd are preliminarily provided and lead wires 4 are attached. The moisture sensor using such as moisture-sensitive material has a relatively low resistance value, has a stable moisture characteristic without showing a decrease in the moisture sensing functions even after resting for a long period and does not require a heater for preventing deterioration with age. The reason thereof lies in that when there is substantially no moisture the alkali metallic ions exist stably in the fine three-dimensional structure of the zeolite and that when the moisture increases the ions are driven to the outside by H2O and are eluted into the adsorbed water. The eluted ions contribute to conduction and such phenomenon is repeated dryness and wetness.</p> |
