摘要 |
<p>PURPOSE:To enable the adjustment of the capacity value after pelletizing or assembling by dividing the top metal of an MIM capacitor into a plurality on a capacitor region, thereby connecting arbitrary number of component parts. CONSTITUTION:The surface of a substrate 10 is coated with an insulating film 209, and a capacitor primary metal 1 is formed on the film 20. A capacitor insulating film 2 is formed on the metal 1, and capacitor top metals 3-1-3-5 divided into a plurality are formed thereon. They are gathered to one through upper metal leading electrodes 4-1-4-5. Any of the electrodes 4-1-4-5 is cut by a laser trimmer to readily regulate the capacitor capacity value after pelletizing or assembling.</p> |