发明名称 PROBE FOR SEMICONDUCTOR DEVICE
摘要 PURPOSE:To prevent ink, silicon scraps, metal scraps to scatter in case of putting an improper mark from readhering to the surface of a die of good quality by providing a cylindrical metal gauze on the periphery. CONSTITUTION:Probes 2, 3 provided on a die A and a card substrate 1 of a semiconductor device are contacted to be conducted, and cylindrical metal gauzes 4, 5 are provided around the probes 2, 3, respectively. Foreign materials 6, 7 produced in case of putting an improper mark on the die A are collected by the gauzes 4, 5 provided around the probes 2, 3 to prevent the materials from adhering to the surfaces of the adjacent dies B, C, thereby preventing the semiconductor device from decreasing in the quality.
申请公布号 JPS61259535(A) 申请公布日期 1986.11.17
申请号 JP19850101912 申请日期 1985.05.14
申请人 NEC CORP 发明人 TAKAGI MINORU
分类号 G01R1/067;H01L21/66 主分类号 G01R1/067
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