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发明名称
摘要
申请公布号	JPS61183537(U)	申请公布日期	1986.11.15
申请号	JP19850067724U	申请日期	1985.05.08
申请人		发明人
分类号	H01L21/677;B25B11/00;H01L21/67;H01L21/68;(IPC1-7):H01L21/68	主分类号	H01L21/677
代理机构		代理人
主权项
地址

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