| 摘要 |
PURPOSE:To correct a positioning error, and to detect a defect with a high accuracy by setting a partial area extending over the whole area in an inspecting image pattern, and detecting a compared position at every partial area. CONSTITUTION:A partial area A containing many inspecting image picture elements is set in an inspecting image pattern P2. On the other hand, an expanded area B containing the partial area A and also containing many reference image picture elements, which is wider than said area is set in a reference image pattern P1, and in its area, a reference image pattern reference area C11 of the same size as the partial area A is read out by shifting one picture element each. Subsequently, the number of dissidences is derived by comparing the read-out reference area C11 and the partial area A at every corresponding picture element, and by deriving the reference area C11 where it becomes minimum, a defect detecting compared position of the partial area A is detected. Such a detection is executed by setting the partial area extending over the whole area of the inspecting image pattern P2, and based on the respective defect detecting compared position detecting signals, the compared position of the corresponding inspecting image pattern partials area is corrected, and the compared defect detection is executed.
|
