| 摘要 |
PURPOSE:To eliminate the possibility that semiconductor wafers interfere with the power transmission rollers and to make it possible to contrarotate the feeding/conveying direction for the wafers 180 deg. in the normal direction and in arbitrary directions reverse thereto along the conveying line for the wafers by a method wherein the feeding/conveying line of the semiconductor wafers is set up in nearly parallel to the direction, in which the rotating power transmission rollers are disposed in a row. CONSTITUTION:A positioning roller 3' is a free roller being rotatably born and the roller 3' is not jointly provided with a driving means and a transmission member. Accordingly, a big technical trouble is not accompanied in making the roller retreat and restore in such a way that the roller does not interfere with a semiconductor wafer 1. A semiconductor wafer conveying line E is set up in nearly parallel to a three-point roller row disposed line C. By this constitution, as the conveying line E is nearly parallel to three-point rollers 2a-2c, there is no possibility that the semiconductor wafer 1 interferes with the three- point rollers 2a-2c even though the semiconductor wafer 1 is conveyed along this line E as shown by an arrow (e'). |
