| 摘要 |
PURPOSE:To make a vacuum vessel smaller in size and to reduce the cost of maintenance and the consumption of electric power by using one side of a substrate on which a thin film is formed as part of the surface of the inner wall of the vacuum vessel and by bringing a protective plate into close contact with the other side of the substrate. CONSTITUTION:A mask layer 2 is formed on the prescribed part of the concaved side of a windshield 1, a plastic protective plate 81 is brought into close contact with the convexed side and the windshield 1 is placed on a vacuum vessel 3 having an upper opening 30 with an O ring 9 in-between so that the part surrounded by the mask layer 2 confronts an evaporating source 4 to be heated with electron beams in the vessel 3. After the vessel 3 is evacuated with an oil rotary pump 7, a high vacuum is obtd. with an oil diffusion pump 5. Gaseous O2 is then introduced into the vessel 3 and a thin TiO2 film 10 is formed by ion plating. The internal pressure of the vessel 3 is returned to atmospheric pressure, the substrate 1 is detached from the vessel 3 and the mask layer 2 is removed.
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