| 摘要 |
PURPOSE:To obtain the title durable colored transparent electrically conductive film without necessitating any complicated stages by arranging a transparent substrate in an vacuum apparatus and regulating the temp. of the substrate and the partial pressure of oxygen when the film is formed. CONSTITUTION:A glass substrate 1 is set on a table 53 in a vessel 51 of a vacuum apparatus 5, high-frequency sputtering is carried out while controlling the partial pressure of oxygen in the vacuum apparatus 5 and the temp. of the substrate 1 and a colored electrically conductive film is formed on the substrate 1. The transparent conductive film can be colored bronze, blue, yellow, etc., by the regulation of the substrate temp. and oxygen partial pressure, the oxygen partial pressure is regulated to 10<-7>-10<-1> Pa and the substrate temp. is controlled to 50-450 deg.C.
|
