| 摘要 |
PURPOSE:To enhance the utilization efficiency of the resulting titled target material by producing a mechanical strain in a plastically deformable magnetic material. CONSTITUTION:A mechanical strain is produced in a plastically deformable magnetic material such as 'Permalloy(R)' by a plastic deforming means such as rolling, forging or pressing. At this time, the working temp. is preferably regulated to the recrystallization temp. of the material or below, especially the restoration temp. or below so as to effectively produce the strain. Thus, the coercive force of the material is increased or the magnetic permeability is reduced, and when the resulting target material is fixed in the magnetic circuit of a sputtering apparatus, magnetic flux leaking out of the surface of the material is increased. The material is eroded in an extended region, sputtering is carried out with improved efficiency and the utilization efficiency of the target material can be enhanced.
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