| 摘要 |
PURPOSE:To execute effectively a heat treatment with a single apparatus by providing successively an ion nitrification treatment chamber, ion carburization treatment chamber and cooling chamber, providing freely openably and closably door devices between the respective chambers and providing vacuum suction devices to the respective chambers. CONSTITUTION:The ion nitridation treatment chamber 16, the ion carburization treatment chamber 18 and the cooling chamber 20 are successively provided. The chambers are made freely openable and closable by doors 36, 42, doors 60, 62, doors 88, 86 and doors 94, 95. The inside of the chambers is evacuated to a vacuum by the vacuum devices provided respectively thereto. A work W is thereupon first introduced into the evacuated chamber 16 where the work is subjected to a surface treatment. The work is in succession introduced into the chamber 18 and chamber 20 evacuated to a vacuum and is taken out of the chamber 20. |
