| 摘要 |
PURPOSE:To eliminate waste consumption of energy by reducing a flow rate of high purity distilled water circulating through a circulating pipe line to a value necessary for preventing proliferation of bacteria and feeding back excess distilled water in a main pipe line to a tank without passing through a cooling mechanism. CONSTITUTION:A tank 100 for storing high purity distilled water produced in a producing device of high purity distilled water at a temp. sufficient for inhibiting proliferation of bacteria. A main pipe line 112 for forcing the high purity distilled water stored in the tank to a facility where the water is used, and cooling mechanism 118, 120 for cooling the high purity distilled water in the main pipe line, are installed. The flow rate in the feed back pipe line 124 for circulating the high purity distilled water from an outlet 122 of the distilled water of the main pipe line to the tank is reduced by a reducing mechanism 126 to a small value sufficient for preventing the proliferation of bacteria in the inside of feeding device F for high purity distilled water, and, at the same time, allowing the excess high purity distilled water from a main pipe line between the tank and the cooling mechanisms to the tank through a bypath pipe line 130 while maintaining the pressure in the main pipe line at a fixed pressure. Thus, wasteful energy consumption is eliminated.
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