| 摘要 |
PURPOSE:To provide an inexpensive ink jet head having high density nozzles and to miniaturize said head, by providing a head upper substrate integrally having the conductor and plug forming an electric circuit for driving the elastomer forming a part of the wall of an ink pressure chamber and a head lower substrate having nozzles, ink flow passages, the ink pressure chamber and a common liquid chamber and integrally connecting the head upper and lower substrates. CONSTITUTION:An elastomer 1, the connection pad 2 connecting the elastomer 1 and a vibrator plate 5 and conductor patterns 3, 8 are formed by the photoetching of the metal part of a laminate plate consisting of a thin metal plate 16 and a polymer film 1. The material quality of the film as the elastomer and an insulator is determined according to ink to be used and the thickness thereof is determined by a displacement amount, the diameter of the elastomer and driving energy, etc. Ink jet nozzles 10, an ink pressure chamber 11, ink flow passages 12 and a common liquid chamber 13 are formed to a liquid chamber substrate (head lower substrate) 9 by using photoetching, electroforming, molding or composite processing. A head upper substrate and the head lower substrate are integrally connected. |
