| 摘要 |
PURPOSE:To improve the step shape of magnetic poles without using a special device by forming the lower layer part to the plane shape smaller than the lane shape of the upper layer part in the case of superposing respectively >=2 layers of the upper and lower magnetic poles of a thin film magnetic head. CONSTITUTION:An insulating layer 42 consisting of Al2O3 is formed to 10mum by Rf sputtering on an Al2O3-TiC substrate 41 and further a 'Permalloy(R)' (81% Ni) film 43 is formed thereon to 1,000Angstrom by Rf sputtering to provide a plating conductive film. The 1st lower magnetic pole layer 31 is patterned by photoresist to the shape shown in the figure and is subjected to 'Permalloy(R)' (81% Ni) plating to 2mum to form a soft magnetic layer 45. After the photoresist is stripped, the photoresist is formed to a shape 32 and is subjected to 2mum 'Permalloy(R)' plating, then the photoresist is stripped and the plating conductive film is stripped. The lower magnetic pole 47 of the soft magnetic layer is thus obtd.
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