| 摘要 |
PURPOSE:To obtain the titled tomographic apparatus having high resolving power, constituted so that a monocrystal element is arranged behind an object to be examined and X-rays diffracted by a monocrystal are detected to be formed into an image in the same side as X-rays incident to the surface of the monocrystal. CONSTITUTION:The titled tomographic apparatus is constituted of a slit 5 for determining the shape of parallel X-rays 1 made monochromatic by a proper technique and that of X-rays incident to an object to be examined, a rotatable and scanning possible stage 6 supporting the object to be examined, a slit 8 removing scattered X-rays from the object to be examined, a monocrystal 3 for enlarging an X-ray image, a slit 13 for permitting the transmission only of X-rays diffracted by the monocrystal, a position-sensitive type detector 11 arranged immediately after said slit 13 and a measuring/data processing system 12. By this constitution, the X-ray image can be arbitrarily enlarged according to a predetermined formula and the position resolving power inherently possessed by the detector 11 can be enhanced. Further, because only an extremely narrow wavelength region is diffracted from the aspect of the essence of an X-ray diffraction phenomena by the monocrystal, X-rays having a wavelength different from that of incident X-rays generated from the object to be examined can be removed. |
