| 摘要 |
PURPOSE:To share the parts by employing a lamination structure splitted into three structural elements of external driving means, first flow path structure including first flow path gate valve and second flow path structure including a diaphragm valve. CONSTITUTION:The first flow path structure 2 is comprising the first flow path 8, first flow-out path 9, first gave valve 11 and pressure receiving chamber 12. While the second flow path structure 3 is comprising a flow-in path 13, second flow path 14, second flow-out path 15 and a diaphragm valve 16. When laminating the external driving means 1 including the first flow path structure 2 and the second flow path structure 3, it will provide a three-way valve for switching between two flow paths while when laminating the external driving means 1 and the second flow path structure 3, it will provide a two-way valve. Consequently, the parts can be shared resulting in cost reduction.
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