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发明名称
SAUGVERMOEGENSREGLER FUER VAKUUMTROCKNUNGSPROZESSE
摘要
申请公布号
DE3516551(A1)
申请公布日期
1986.11.13
申请号
DE19853516551
申请日期
1985.05.08
申请人
LEYBOLD-HERAEUS GMBH
发明人
SPRINGER,GERHARD
分类号
F26B5/04;G05D16/06;(IPC1-7):F26B21/06
主分类号
F26B5/04
代理机构
代理人
主权项
地址
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