Device for moving an ignition electrode in a plasma-coating chamber

摘要

The electrode which is used to ignite an arc between the cathode (2) and the anode in a plasma-coating chamber (3) consists of a lever (5) which is supported such that it can pivot (4) and of an arm (6) which is arranged at right angles thereto and can be displaced (7). The sealed closure with respect to the wall (1) of the coating chamber is carried out by means of a bellows compensator (11) which is connected on the one hand to the lever and on the other hand to an insert (8) which is mounted in a sealed manner on the wall. The pivoting movement of the lever is preferably produced by means of a piston (13) which slides in a hydraulic or pneumatic cylinder (12). <IMAGE>