| 摘要 |
<p>The method comprises
providing a flat surface (11) extending at opening (5) of a delivery pipe (3) to the substantially perpendicular direction to the flow direction of fluid (7) in pipe (3) and
providing a ring-shaped or annular inhaling opening (4) of a suction pipe (1) around flat surface (11),
the lower periphery of the outer wall of the outer pipe extending lower than flat surface (11) to form a stopper (12),
moving the openings (4) and (5) near the plate (8),
delivering fluid (7) from delivery pipe (3),
inhaling fluid in inhaling opening (4),
to support the plate (8), such as a semicondcutor wafer or a magnetic disc, near and at a constant distance
from flat surface (11) without physical contact therewith, and to prevent disturbance of the surrounding atmosphere by the fluid and attachment of dust on the plate (8),
or providing a flat surface (11) extending at opening (4) of an inhaling pipe (1) to the substantially perpendicular direction to the flow direction of fluid (6) in pipe (1) and
providing a ring-shaped or annular opening (5) of a delivery pipe (3) around flat surface (11),
or delivering said fluid (7) from said delivery opening (5). </p> |
