| 摘要 |
PURPOSE:To prevent the thermal diffusion of a detecting element and to exclude the effect of visible light so as to prevent a false operation, by connecting electrically an electrode of each pyroelectric infrared element with a signal charge reading member by using a through hole portion of a substrate. CONSTITUTION:Signal charge reading members 2 are disposed on one side of a semiconductor substrate 1, while cavity grooves 3 are formed on the other side of the substrate 1, and further through hole portions 4 are formed in the substrate 1. A plurality of pyroelectric infrared ray detecting elements 5 are fitted so that they cover said cavity grooves 3 and are separated from each other in a suspended state. Electrodes 7 and 8 are provided on the opposite sides of said detecting elements and signal reading electrodes 11 of the reading members 2 are connected electrically with the electrodes 7 of the detecting elements 5 by means of a conductive adhesive, respectively, by using the through hole portions 4. Thereby the thermal diffusion of the detecting elements 5 is prevented to check the deterioration of the quality of a picture, infrared rays are made to be incident from the opposite side of the reading members 2 so as to exclude the effect of visible light, and thus a false operation is prevented. |
