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发明名称
CHEMICAL VAPOUR DEPOSITION
摘要
申请公布号
GB8623978(D0)
申请公布日期
1986.11.12
申请号
GB19860023978
申请日期
1986.10.06
申请人
EPSILON LP
发明人
分类号
C23C16/46;C23C16/44;C23C16/455;C23C16/54;C30B25/14;(IPC1-7):C23C16/46
主分类号
C23C16/46
代理机构
代理人
主权项
地址
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