| 摘要 |
PURPOSE:To prevent a wafer from being contaminated by additives on the surface of a rubber belt by coating the surface of the belt for putting a wafer thereon with plastic film so that the belt does not contact the wafer. CONSTITUTION:After a round belt 1 made of thermoplastic urethane rubber is inserted in a fluororesin tube 2, the tube 2 is thermal contracted by hot air, and both end surfaces of the round belt are heat deposited. Thus, a ring-shaped belt coated with the tube 2 is made. Such two belts are stretched between two polyvinyl chloride rollers 4, and the urethane rubber belts 3 coated with the tubes 2 are rotated together with the rollers 4 by a motor 6. After a wafer 5 is placed to be static with the mirror surface thereof brought into contact with the belts 3, the wafer is conveyed. In this case, there are few contaminants adhering to the mirror surface, so that contamination of a transported article can be improved remarkably.
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