| 摘要 |
PURPOSE:To select simply a data item matching with the purpose of analysis by digitizing the discrimination data to perform analysis for weighted primary component of said numerical value and the numerical data and displaying the results of said analysis on a plane formed by the 1st and 2nd primary component axes. CONSTITUTION:Manufacturing process data serving as an analysis candidate is stored in a data memory means 1. For a LSI manufacturing process, the manufacturing process data includes both the numerical data on the yield, the etching amount, the threshold voltage, the gate size, etc. and the discrimination data on the etching machining date, the etching device name, etc. A data preprocessing means 2 digitizes the discrimination data. And an analysis means 3 applies the weighted primary component analysis to the discrimination data changed into the numerical value as well as the original numerical data to obtain the factor load amount of each data item against the 1st and 2nd primary components. These load amounts are displayed on a display means 4. The data items names of the factor load amounts are plotted on the planes of the primary component axes Z1 and Z2 with respect to the 1st and 2nd primary components. Then the analysis data items are selected by noticing the data group approximate to 1 of the 1st primary component axis Z1. |
