| 摘要 |
A mixture control apparatus controls a flow rate of a second fluid to be mixed with a first fluid so as to prepare a third fluid having a predetermined concentration. A set point variable of the flow rate of the second fluid is calculated in accordance with the flow rate of the third fluid so as to improve controllabilty of the apparatus. A gain correction circuit calculates a gain correction quantity using the flow rate of the third fluid. A feed forward circuit calculates a feed forward control component. A feedback circuit calculates a feedback control component. The set point variable of the flow rate of the second fluid is calculated in accordance with the feed forward control component and the feedback control component. The flow rate of the second fluid is controlled to coincide with this set point variable.
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