| 摘要 |
PURPOSE:To make it possible to adjust the humidity over a wide range and to hold it at a constant value with a high accuracy by providing a humidity adjustor utilizing a steam separation phenomenon due to a permeable film, and changing over the flowpath of any of a humidified gas and a humidified gas produced. CONSTITUTION:In a case where the humidity of a humidity-retaining room 2 measured by a humidity sensor 22 is more than a target relative humidity, a control system 24 makes flowpath-changeover doors 7A and 7B close communication ports 6A and 6B to communicate the humidity-retaining room 2 with an auxiliary room 3 and flowpath-changeover valves 16 and 20 change over the flowpath to communicate the inner parts of the permeable films 10... with the external parts. The gas within the humidity-retaining room is fed to steam- selecting permeable films 10... through a communicating port 5A so as to bring the gas into contact with the external surface of each of the films 10..., and the pressure in the inner parts of the permeable films 10... is reduced by the operation of a vacuum pump 18 thereby to bring the pressure-reduced gas having a pressure which is less than that of the gas within the humidity-retaining room, into contact with the inner surfaces of the permeable films 10.... Then, a steam partial pressure difference is created on both inner and outer surfaces of each of the permeable films 10..., and steam within the gas permeates from the outer surfaces to the inner surfaces of the films 10....
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