| 摘要 |
PURPOSE:To enable accurate control of the quantity of the liquid material to be vaporized with the set temperature of the liquid material and the flow rate of the carrier gas to be introduced, by inserting a tube into the liquid material, which tube has a sufficient length for the temperature of the introduced gas to become equal to the temperature of the liquid material. CONSTITUTION:A liquid material 3 is enclosed in a sealed cylinder 2 having a gas outlet valve 1. Inserted into the liquid material 3 is a dip tube 5 having a gas inlet valve 4. The dip tube 5 is folded several times below the liquid surface 6 of the liquid material. The temperature of the carrier gas introduced into the dip tube becomes equal to the set temperature of the liquid material during the passage through the portion below the liquid surface 6, and then the carrier gas is discharged into the liquid material. For more positive heat exchange between the carrier gas and the liquid material, it is only needed to provide the dip tube with a sufficient length and a thin radial thickness. The design for these may be decided in dependence on the set temperature of the liquid material and the quantity of the carrier gas to be introduced. |
