| 摘要 |
PURPOSE:To obtain a good polished surface with less polishing scratches by providing a large and deep groove and small and shallow triangular grooves and setting the height of said triangular groove in the range of 10-40mum and its groove pitch in the range of 0.1-0.2mm. CONSTITUTION:A deep groove 5 having a large groove width, and shallow triangular grooves 6 having small groove widths are spirally provided on the polishing surface of a polishing surface table. The height (h) in the triangular form of the groove 6 is formed in the range of 10-40mum, and the groove pitch is formed in the range of 0.1-0.2mm. In an abrasive grain 7 which is laid in the ridge part is removed due to polishing pressure, etc., it falls in the shallow groove 6. In this case, if the groove 6 is too small, the abrasive grain is not smoothly discharged into the groove 5, causing a polishing scratch to be formed on a workpiece, while reducing the life of the polishing surface table 1. On the contrary, if the groove 6 is too large, a swell, etc. may be formed on the workpiece impairing its flatness, but this configuration allows a removed abrasive grain 4 to fall into the groove 6 and further to be discharged out into the groove 5. Thereby, a polished surface with less polishing scratches and having a good flatness can be obtained. |
